美国APTECH调节器AZ 1000系列毕尔途专业高

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总览
AP Tech，也称为高级压力技术，是气体处理部件的制造商，主要是压力调节器和阀门。 AP Tech的长处是通过超高纯度应用提供高纯度特种气体的产品。从源容器到使用点，再到处理工具或设备本身，*，AP Tech产品可提供质量，性能和可靠性不受影响的气体。该公司为服务和支持设定了终标准，这些特征现已成为AP Tech品牌的代名词。
各种各样的气体输送产品可满足大多数应用。从腐蚀性气体源面板的挑战到工艺使用点所需的精细控制，AP Tech产品在压力下均可提供高性能。
该公司由行业人士Rene Zakhour于1987年成立。他的目标是制造以服务和支持为后盾的可靠产品。如今，AP Tech现已成为我们半导体和电子行业主要市场的*，在他的下，并在他的工作中追求的敦促下，我们继续努力实现Rene的目标。就这么简单。

美国APTECH调节器AZ 1000系列毕尔途专业高

压力调节器
AP Tech的各种调节器的入口压力范围高达10,000 psig（690 bar），输送压力从压力到10,000 psig（690 bar）。流量也有很大的范围，从几sccm到数千slpm。无论是手动弹簧加载还是气动驱动，连接尺寸为1/8英寸至1英寸，AP Tech都是通过超高纯气体输送实现高纯度的优选调节器。

Operating Parameters

Source pressure vacuum to 3,500 psig (241 bar)

AZ 1001 and TF option vacuum to 300 psig (21 bar)

Delivery pressure AZ 1001 1 to 10 psig (0.07 to 0.7 bar)

AZ 1002 1 to 30 psig (0.07 to 2 bar)

AZ 1006 2 to 60 psig (0.14 to 4 bar)

AZ 1010 2 to 100 psig (0.14 to 7 bar)

AZ 1015 5 to 150 psig (.34 to 10 bar)

AZ 1030 5 to 300 psig (.34 to 21 bar)

Proof pressure 150% of operating pressures

Burst pressure 300% of operating pressures

 

SS 316L construction

• 10 µin. surface finish(25 µin. optional)

• Vacuum to 3500 psig(241 bar) inlet

• 1 to 300 psig (0.07 to 21bar) outlet

• Cleaned, assembled and packaged for high purity semiconductor applications

• Flow rates- Standard to 30 slpm - HF option to 120 slpm

• Regulator of choice for point of use applications

• Knob LOTO (refer to AP KL data sheet)

• Installation and operating instructions available at

美国APTECH调节器AZ 1000系列毕尔途专业高

in the Tech Briefs section

 

 

Other Parameters

Inlet/outlet connectors 1/4 or 3/8 inch face seal or tube weld

Flow coefficient (Cv) 0.09 (0.15 HF option)

Internal volume 0.49 in3 (8 cm3)

Operating temperature -40° to +160°F (-40° to +71°C)*

Surface finish 10 µin. (0.25 µm) Ra avg. standard

25 µin. (0.62 µm) Ra avg. optional

Inboard leakage 2 x 10-10 sccs

Outboard leakage 2 x 10-9 sccs He

Leakage across seat 4 x 10-8 sccs He

Installation surface or panel (optional)

Supply pressure effect 0.25 psig per 100 psig source pressure change

HF 0.75 psig per 100 psig source pressure change

 

材质：316不锈钢

Sample Order Number AZ 1010SQ 2PW FV4 FV4

AZ1010S3PWFV4MV40
AZ1010S2PWFV4MV4

AZ1010S 2PW FV4 MV4

AZ 1010 | Series

 

AZ 1001 = 1-10 psig (.07 to .7 bar)

AZ 1002 = 1-30 psig (.07 to 2 bar)

AZ 1006 = 2-60 psig (.14 to 4 bar)

AZ 1010 = 2-100 psig (.14 to 7 bar)

AZ 1015 = 5-150 psig (.34 to 10 bar)

AZ 1030 = 5-300 psig (.34 to 21 bar)

S | Material

 

S = Stainless steel (SS)

SHP = SS/Ni-Cr-Mo alloy poppet and

S diaphragm

Q | Surface

Finish Option

Q = 25 µin. Ra avg.

2PW | Ports

2PW = 2 ports butt weld

3PW = 3 ports butt weld

4PW = 4 ports butt weld

 

FV4 FV4 | Connections

Inlet / Outlet

FV4 = 1/4 inch face seal female

MV4 = 1/4 inch face seal male

FV6 = 3/8 inch face seal female

MV6 = 3/8 inch face seal male

Tube weld stub available

Delivery

Gauge*

 

0 = No gauge

V3 = 30-0-30 psig/bar

L = 30-0-60 psig/bar

1 = 0-100 psig/bar

H = 30-0-160 psig/bar

4 = 0-400 psig/bar

10 = 0-1000 psig/bar

40 = 0-4000 psig/bar

* Standard gauge port is 1/4 inch face seal male

(1/4 inch face seal female are available).

Options

VS = Polyimide seat

TF = PTFE seat

HF = High flow

P = Panel installation**

KL = Knob LOTO (refer to AP KL data sheet)

** Panel hole 1.569 diameter.